Dynamics simulation of microelectromechanical electrostatic actuator incorporating the squeeze-film damping effect
نویسندگان
چکیده
منابع مشابه
Effect of squeeze on electrostatic TG wave damping
We present a 1D theory, neglecting radial dependency, for the damping of cylindrically symmetric plasma modes due to a cylindrically symmetric squeeze potential Vsq(z), applied to the axial midpoint of a non-neutral plasma column. Inside the plasma, particles experience a much smaller, Debye shielded squeeze potential φ0(z) of magnitude φs. Squeeze divides the plasma into passing and trapped pa...
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ژورنال
عنوان ژورنال: Journal of Vibroengineering
سال: 2017
ISSN: 1392-8716
DOI: 10.21595/jve.2016.18050